https://doi.org/10.1140/epjp/s13360-024-05037-x
Regular Article
Study on influence of thickness and annealing on electrical characteristics of iron-doped vanadium oxide (Fe:V2O5) thin films for sensor application
Department of Electronics and Instrumentation Engineering, Siddaganga Institute of Technology, 572103, Tumakuru, Karnataka, India
Received:
6
January
2024
Accepted:
24
February
2024
Published online:
11
March
2024
The objective of this study is to determine the ideal thickness and annealing temperature ranges for the derived 15 weight percent iron (Fe)-doped vanadium pentoxide (V2O5) nanoparticles by depositing them as thin films on a glass substrate using e-beam evaporation. The appropriateness of these films' structural, morphological, and electrical properties for the development of thin-film strain gauges is investigated. Through structural research, the nano-structured crystallite grain size of 0.1494 Å in an orthorhombic layered cubic structure was identified. The SEM images show the uniformly dispersed morphology of the deposited films. The greater adatom mobility seen as a result of surface diffusion kinetics and atomic shadowing is highlighted by the significant change in RMS surface roughness between 0.502 and 1.785 nm. Through examination of its electrical characteristics, it was discovered that when the film's thickness increased from 80 to 250 nm, the resistance decreased from 2.4 MΩ to 26.74 KΩ and ultimately to 24.38 KΩ. This decrease was further observed when the annealing temperature was raised to 500 °C. At the thickness range of 220 nm and the annealing temperature of 300 °C, the resistance also showed the lowest recorded dip of 11.75 KΩ. Therefore, it was concluded that these optimized process parameters of 220 nm and 300 °C would be appropriate for its utilization in the development of sensors, when addressing samples that contained 15 weight percent Fe: V2O5.
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© The Author(s), under exclusive licence to Società Italiana di Fisica and Springer-Verlag GmbH Germany, part of Springer Nature 2024. Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.
