https://doi.org/10.1140/epjp/s13360-022-03358-3
Regular Article
Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation
1
Centro de Microanálisis de Materiales (CMAM), Universidad Autónoma de Madrid (UAM), Cantoblanco, 28049, Madrid, Spain
2
Departamento de Física Aplicada, Universidad Autónoma de Madrid, 28049, Madrid, Spain
3
Departamento de Física, Universidad Carlos III de Madrid, Avda. Universidad 30, 28911, Leganés, Madrid, Spain
4
Instituto de Óptica, Consejo Superior de Investigaciones Científicas (CSIC), C/Serrano 121, 28006, Madrid, Spain
5
Department of Applied Science and Technology, Politecnico Di Torino, Turin, Italy
6
Instituto de Fusión Nuclear “Guillermo Velarde”, Universidad Politécnica de Madrid, C/ José Gutiérrez Abascal 2, 28006, Madrid, Spain
7
ALBA Synchrotron Light Source (CELLS-ALBA), Cerdanyola del Vallès, 08290, Barcelona, Spain
Received:
17
June
2022
Accepted:
2
October
2022
Published online:
19
October
2022
This paper describes in detail a novel manufacturing process for optical gratings suitable for use in the UV and soft X-ray regimes in a single-crystal diamond substrate based on highly focused swift heavy-ion irradiation. This type of grating is extensively used in light source facilities such as synchrotrons or free electron lasers, with ever-increasing demands in terms of thermal loads, depending on beamline operational parameters and architecture. The process proposed in this paper may be a future alternative to current manufacturing techniques, providing the advantage of being applicable to single-crystal diamond substrates, with their unique properties in terms of heat conductivity and radiation hardness. The paper summarizes the physical principle used for the grating patterns produced by swift heavy-ion irradiation and provides full details for the manufacturing process for a specific grating configuration, inspired in one of the beamlines at the ALBA synchrotron light source, while stressing the most challenging points for a potential implementation. Preliminary proof-of-concept experimental results are presented, showing the practical implementation of the methodology proposed herein.
© The Author(s) 2022
Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article's Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article's Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.
