https://doi.org/10.1140/epjp/s13360-022-02587-w
Regular Article
Investigation over effect of different carbon content on various properties of titanium carbon nitride (TiCN) coating grown on Si (100) substrate by chemical vapor deposition (CVD) process
1
School of Mechanical Engineering, KIIT University, 751024, Bhubaneswar, India
2
Depratment of Mechanical Engineering, Sikkim Manipal Institute of Technology, Sikkim Manipal University, 737136, Gangtok, Sikkim, India
Received:
21
October
2021
Accepted:
10
March
2022
Published online:
18
March
2022
In this work, chemically vapor deposited TiCN coating consists of crack network over the surface with higher C content due to the impingement of higher amount of nitrogen gas over it. The surface morphology analysis by AFM suggests that with higher C content particles distribution density of TiCN coating changes abruptly due to the presence of small or tiny particles in between large particles. Irrespective of C content the relation between Ra and indentation modulus is found to be nonlinear as 1–3% scattering being observed. The microstructure analysis by XRD confirms that the TiCN is multiphase material with the presence of crystalline phase at (111), (200) and (220) crystal planes and graphite phase at ~ 52°. As the corrosion potential (Ecorr values) has been shifted toward the negative side hence corrosion resistance of TiCN coating reduces with higher C content. The higher C content improves the crystal quality of TiCN coating as the peak position of different phonon modes are blue shifted. The mechanical property analysis suggests that with higher C content the preferred growth orientation has been formed and this ultimately improves the mechanical properties.
© The Author(s), under exclusive licence to Società Italiana di Fisica and Springer-Verlag GmbH Germany, part of Springer Nature 2022
